Title :
Phase-Sensing Interferometry for Flying-Height Metrology
Author :
Sappey, R. ; Carr, T. ; Loera, M. ; Lee, C.
Author_Institution :
Diamond Div., Flanders Drive Site B, San Diego, CA
fDate :
Nov. 29 2006-Dec. 1 2006
Abstract :
A new technology for flying height (FH) metrology using differential phase-sensing interferometry is presented. We discuss its advantages over previously used methods and present measurement results on modern slider designs.
Keywords :
disc drives; hard discs; height measurement; phase shifting interferometry; test equipment; differential phase-sensing interferometry; disc drive; flying-height metrology; slider; test equipment; Calibration; Glass; Interferometry; Length measurement; Metrology; Performance evaluation; Phase measurement; Rotation measurement; Testing; Vibration measurement; disk drive; flying-height; interferometry; phase; test equipment;
Conference_Titel :
Asia-Pacific Magnetic Recording Conference, 2006
Conference_Location :
Singapore
Print_ISBN :
1-4244-0863-6
DOI :
10.1109/APMRC.2006.365953
