Title :
Silicon photodiodes
Author :
Ohashi, Kazumi ; Fujikata, J. ; Ishi, Tsutomu ; Nishi, Kentaro ; Mizuno, M. ; Nose, Keisuke ; Ishihara, Koichi ; Baba, Toshihiko
Author_Institution :
NEC Corp., Ibaraki
Abstract :
A high-speed Si nano-photodiode with a surface plasmon antenna has been developed. The optical near-field technology used in this device will increase the feasibility of on-chip optical data transmission and optical clock distribution in LSIs
Keywords :
antennas in plasma; elemental semiconductors; high-speed optical techniques; integrated optoelectronics; nanoelectronics; photodiodes; silicon; surface plasmon resonance; Si; high-speed silicon nanophotodiodes; on-chip optical data transmission; optical clock distribution; optical near-field technology; surface plasmon antenna; Apertures; Circuit simulation; Gratings; Optical pulses; Optical surface waves; Photodiodes; Plasmons; Silicon; Surface topography; Voltage;
Conference_Titel :
Group IV Photonics, 2006. 3rd IEEE International Conference on
Conference_Location :
Ottawa, Ont.
Print_ISBN :
1-4244-0096-1
DOI :
10.1109/GROUP4.2006.1708204
