Title :
Bright Green Visible Electroluminescence from Rare Earth Doped Silicon Rich SiOx
Author :
MacElwee, T.W. ; Hill, S.E. ; Campbell, Stuart ; Ducharme, D. ; Ruoux, B.A. ; Calder, I.D. ; Flynn, Michael ; Wojcik, Janusz ; Gujrathi, S. ; Mascher, P.
Author_Institution :
Group IV Semicond. Inc.,, Ottawa, Ont.
Abstract :
Silicon rich silicon oxide was deposited by ECR-PECVD, doped with Er or Tb, and processed into device structures. Electrical measurements were used to characterize conduction mechanisms while spectroscopic electroluminescence provided information on brightness and mechanisms
Keywords :
electroluminescence; erbium; plasma CVD; silicon compounds; terbium; ECR-PECVD; Si; SiOx:Er; SiOx:Tb; bright green visible electroluminescence; conduction mechanism; electrical measurement; electron cyclotron resonance plasma enhanced chemical vapour deposition; erbium; rare earth doped silicon rich silicon oxide; silicon substrates; spectroscopic electroluminescence; terbium; Annealing; Conducting materials; Dielectric materials; Electric variables measurement; Electroluminescence; Erbium; Luminescence; Optical films; Semiconductor films; Silicon;
Conference_Titel :
Group IV Photonics, 2006. 3rd IEEE International Conference on
Conference_Location :
Ottawa, Ont.
Print_ISBN :
1-4244-0096-1
DOI :
10.1109/GROUP4.2006.1708218
