• DocumentCode
    2662374
  • Title

    Bright Green Visible Electroluminescence from Rare Earth Doped Silicon Rich SiOx

  • Author

    MacElwee, T.W. ; Hill, S.E. ; Campbell, Stuart ; Ducharme, D. ; Ruoux, B.A. ; Calder, I.D. ; Flynn, Michael ; Wojcik, Janusz ; Gujrathi, S. ; Mascher, P.

  • Author_Institution
    Group IV Semicond. Inc.,, Ottawa, Ont.
  • fYear
    2006
  • fDate
    13-15 Sept. 2006
  • Firstpage
    216
  • Lastpage
    218
  • Abstract
    Silicon rich silicon oxide was deposited by ECR-PECVD, doped with Er or Tb, and processed into device structures. Electrical measurements were used to characterize conduction mechanisms while spectroscopic electroluminescence provided information on brightness and mechanisms
  • Keywords
    electroluminescence; erbium; plasma CVD; silicon compounds; terbium; ECR-PECVD; Si; SiOx:Er; SiOx:Tb; bright green visible electroluminescence; conduction mechanism; electrical measurement; electron cyclotron resonance plasma enhanced chemical vapour deposition; erbium; rare earth doped silicon rich silicon oxide; silicon substrates; spectroscopic electroluminescence; terbium; Annealing; Conducting materials; Dielectric materials; Electric variables measurement; Electroluminescence; Erbium; Luminescence; Optical films; Semiconductor films; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics, 2006. 3rd IEEE International Conference on
  • Conference_Location
    Ottawa, Ont.
  • Print_ISBN
    1-4244-0096-1
  • Type

    conf

  • DOI
    10.1109/GROUP4.2006.1708218
  • Filename
    1708218
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2662374