DocumentCode :
2662466
Title :
Piezoresistive effect in silicon nanowires — A comprehensive analysis based on first-principles calculations
Author :
Nakamura, Koichi ; Dao, Dzung Viet ; Tung, Bui Thah ; Toriyama, Toshiyuki ; Sugiyama, Susumu
Author_Institution :
Res. Inst. for Nanomachine Syst. Technol., Ritsumeikan Univ., Kusatsu, Japan
fYear :
2009
fDate :
9-11 Nov. 2009
Firstpage :
38
Lastpage :
43
Abstract :
We have simulated the electronic states and the piezoresistive effect response to mechanical strain in single-crystal silicon nanowires (SiNWs) with hydrogen termination by using first-principles calculations of model structures with various wire orientations. Based on our original idea for a small amount of carrier occupation, the carrier conductivity along the wire axis has been calculated in terms of band carrier densities and their corresponding effective masses derived from the one-dimensional first-principles band diagram. In the hydrogen-terminated <001> SiNW model, the uniaxial tensile stress to the longitudinal direction causes a sharp drop in the band energy of the highest valence-band (VB) subband, leading to the redistribution of holes to other VB subbands with a huge hole effective mass. The sudden change in the hole occupation with the increase in effective mass will bring a drastic decrease in the hole conductivity. We have obtained a giant longitudinal piezoresistance coefficient for the p-doped <001> SiNW model, and it is expected that p-doped <001> SiNW without dangling bonds will be one of the most suitable candidates for NEMS piezoresistors due to its giant piezoresistivity. On the contrary, the hole conductivity for the p-doped <111> SiNW depends only on the hole mobility of the highest VB subband. As a result, the longitudinal and transverse piezoresistance coefficients for p-type <111> SiNW without dangling bonds are very small.
Keywords :
Young´s modulus; ab initio calculations; carrier density; doping profiles; effective mass; electrical conductivity; elemental semiconductors; hole mobility; nanoelectromechanical devices; nanowires; piezoresistance; piezoresistive devices; resistors; semiconductor doping; silicon; tensile strength; valence bands; NEMS piezoresistor; Si; SiNW model; Young´s modulus; carrier conductivity; carrier density; comprehensive analysis; doping; effective mass; electronic states; first-principles calculation; giant piezoresistivity; hole conductivity; hole mobility; hole redistribution; mechanical strain; piezoresistive effect; single-crystal silicon nanowires; transverse piezoresistance coefficients; uniaxial tensile stress; valence-band; Capacitive sensors; Charge carrier density; Conductivity; Effective mass; Hydrogen; Nanowires; Piezoresistance; Silicon; Tensile stress; Wire;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro-NanoMechatronics and Human Science, 2009. MHS 2009. International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
978-1-4244-5094-7
Electronic_ISBN :
978-1-4244-5095-4
Type :
conf
DOI :
10.1109/MHS.2009.5352099
Filename :
5352099
Link To Document :
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