Title :
Low-Loss Amorphous Silicon Channel Waveguides for Integrated Photonics
Author :
Sparacin, D.K. ; Sun, R. ; Agarwal, A.M. ; Beals, M.A. ; Michel, J. ; Kimerling, L.C. ; Conway, T.J. ; Pomerene, A.T. ; Carothers, D.N. ; Grove, M.J. ; Gill, D.M. ; Rasras, M.S. ; Patel, S.S. ; White, A.E.
Author_Institution :
Dept. of Mater. Sci. & Eng., Massachusetts Inst. of Technol., Cambridge, MA
Abstract :
Amorphous silicon (a-Si), single-mode, channel waveguides were fabricated and measured with transmission losses as low as 6.5 dB/cm for the TE mode and 4.5 dB/cm for the TM mode. Variations in the PECVD a-Si deposition conditions yielded a-Si materials with bulk losses <1 dB/cm
Keywords :
amorphous semiconductors; integrated optics; optical fabrication; optical losses; optical testing; optical waveguides; plasma CVD; silicon; PECVD deposition; Si; TE mode; TM mode; bulk losses; integrated photonics; low-loss amorphous silicon channel waveguide; single-mode waveguide fabrication; transmission losses; Absorption; Amorphous silicon; Atom optics; Hydrogen; Optical films; Optical refraction; Optical waveguides; Photonics; Plasma temperature; Silicon compounds;
Conference_Titel :
Group IV Photonics, 2006. 3rd IEEE International Conference on
Conference_Location :
Ottawa, Ont.
Print_ISBN :
1-4244-0096-1
DOI :
10.1109/GROUP4.2006.1708231
