Title :
Tunable Infrared Sensors - Integration of MEMS with Semiconductor Detectors
Author :
Dell, John M. ; Musca, Charles A. ; Antoszewski, Jarek ; Faraone, L.
Author_Institution :
Microelectron. Res. Group, Western Australia Univ., Crawley, WA
Abstract :
Tunable infrared sensors fabricated by surface micromachining with a maximum thermal budget of 2 hours at 125degC have been realized, demonstrating that a generic, robust, environmentally stable MEMS process is possible using maximum process temperatures <200degC
Keywords :
infrared detectors; micromachining; micromechanical devices; optical sensors; optical tuning; semiconductor devices; 125 degC; 2 hours; MEMS; microelectromechanical device; semiconductor detector; surface micromachining; tunable detectors; tunable infrared sensor; Fabry-Perot; Filters; Hyperspectral imaging; Infrared detectors; Infrared sensors; Micromachining; Micromechanical devices; Mirrors; Optical surface waves; Sensor arrays;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708237
