DocumentCode

2662734

Title

Large Area Fine Line Patterning by Scanning Projection Lithography

Author

Müller, Heinrich G. ; Yuan, Yanrong ; Sheets, Ronald E.

Author_Institution

TAMARACK Scientific, CA

fYear

1994

fDate

13-15 Apr 1994

Firstpage

100

Lastpage

104

Keywords

Costs; Geometry; Laminates; Lithography; Manufacturing; Optical design; Optical distortion; Optical films; Substrates; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Multichip Modules, 1994. Proceedings of the 1994 International Conference on

Print_ISBN

0-930815-39-4

Type

conf

DOI

10.1109/ICMCM.1994.753536

Filename

753536