DocumentCode :
2662810
Title :
Mcm Substrate with High Capacitance
Author :
Kambe, Rokuro ; Imai, Ryuji ; Takada, Toshikatsu ; Arakawa, Michiya ; Kuroda, Masao
Author_Institution :
NTK Technical Ceramics Div., NGK Spark Plug Go., Ltd., Japan
fYear :
1994
fDate :
13-15 Apr 1994
Firstpage :
136
Lastpage :
141
Keywords :
Capacitance; Capacitors; Ceramics; Dielectric materials; Dielectric substrates; Dielectric thin films; Electrodes; Rough surfaces; Sputtering; Surface roughness;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Multichip Modules, 1994. Proceedings of the 1994 International Conference on
Print_ISBN :
0-930815-39-4
Type :
conf
DOI :
10.1109/ICMCM.1994.753542
Filename :
753542
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2662810
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