Title :
Silicon Microtoroidal Resonators with Integrated MEMS Tunable Optical Coupler
Author :
Yao, Jin ; Leuenberger, David ; Lee, Ming-Chang M. ; Wu, Ming C.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA
Abstract :
A single crystalline silicon microtoroidal resonator with integrated MEMS tunable optical coupler is demonstrated for the first time. The coupling coefficient is continuously tuned from almost zero up to 13.3%
Keywords :
elemental semiconductors; integrated optics; micro-optomechanical devices; micromechanical resonators; optical couplers; optical resonators; optical tuning; silicon; coupling coefficient; crystalline silicon microtoroidal resonators; integrated MEMS tunable optical coupler; Fiber nonlinear optics; Integrated optics; Micromechanical devices; Optical coupling; Optical filters; Optical resonators; Optical sensors; Optical waveguides; Silicon; Tunable circuits and devices;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708243
