Characterization of Piston-Tip-Tilt mirror pixels for scalable SLM arrays

Author

Pardo, Flavio ; Simon, M.E. ; Aksyuk, V.A. ; Ryf, R. ; Lai, W.Y.C. ; Pai, C.S. ; Klemens, F.P. ; Miner, J.F. ; Cirelli, R.A. ; Ferry, E.J. ; Bower, J.E. ; Mansfield, W.M. ; Kornblit, A. ; Sorsch, T.W. ; Taylor, J.A. ; Baker, M.R. ; Fullowan, R. ; Dyson, H

Author_Institution

Lucent Technol. Bell Labs., Murray Hill, NJ

fYear

2006

fDate

21-24 Aug. 2006

Firstpage

21

Lastpage

22

Abstract

We present arrays of electrostatically actuated 64times64 piston-tip-tilt micromirrors realized using a surface micromachining 3-structural-layer polysilicon process. High fill factor, flat mirrors 120 mum in size have mechanical response in the order of 10 mus, with plusmn4 mechanical tip and tilt and 5 mum piston continuous, controllable range under 110 V. The actuator design is based on four dual in-plane comb drives with 0.5 mum critical features size

Keywords

electrostatic actuators; integrated optics; micro-optomechanical devices; micromachining; micromirrors; optical arrays; pistons; spatial light modulators; 0.5 micron; 110 V; 120 micron; 3-structural-layer polysilicon process; dual in-plane comb drives; electrostatically actuated piston-tip-tilt micromirrors; fill factor; mechanical response; piston-tip-tilt mirror pixels characterization; scalable SLM arrays; surface micromachining; Actuators; Adaptive optics; Micromechanical devices; Micromirrors; Mirrors; Optical arrays; Optical design; Optical films; Packaging; Pistons;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on

Conference_Location

Big Sky, MT

Print_ISBN

0-7803-9562-X

Type

conf

DOI

10.1109/OMEMS.2006.1708245

Filename

1708245