Title :
One Megapixel SLM with High Optical Fill Factor and Low Creep Actuators
Author :
Friedrichs, Martin ; Schmidt, Jan ; Duerr, Peter ; Bakke, Thor
Author_Institution :
Fraunhofer-Inst. for Photonic Microsyst., Dresden
Abstract :
A one megapixel micromirror based SLM with two layer torsional mirror actuators was monolithically integrated on CMOS. The mirrors have a high optical fill factor and a very low level of mechanical creep when actuated
Keywords :
CMOS integrated circuits; integrated optics; integrated optoelectronics; micro-optomechanical devices; microactuators; micromirrors; monolithic integrated circuits; spatial light modulators; CMOS; mechanical creep actuators; megapixel SLM; micromirror; monolithically integration; optical fill factor; torsional mirror actuators; Actuators; Aluminum alloys; Creep; Electrodes; Micromirrors; Mirrors; Optical materials; Optical modulation; Polymers; Springs;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708246
