• DocumentCode
    2663008
  • Title

    Fully-Functional Tip-Tilt-Piston Micromirror Array

  • Author

    Milanovic, Veljko ; Castelino, Kenneth ; McCormick, Daniel

  • Author_Institution
    Adriatic Res. Inst., Berkeley, CA
  • fYear
    2006
  • fDate
    21-24 Aug. 2006
  • Firstpage
    38
  • Lastpage
    39
  • Abstract
    A fully-functional 2times2-element array of tip-tilt-piston micromirrors with large deflection angles and large piston range is presented. The fabrication of micromirrors with different technique is described
  • Keywords
    micro-optomechanical devices; micromirrors; optical arrays; optical fabrication; deflection angles; micromirror fabrication; piston range; tip-tilt-piston micromirror array; Actuators; Bonding; Calibration; Control systems; Couplings; Micromirrors; Mirrors; Pistons; Silicon; Voltage control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
  • Conference_Location
    Big Sky, MT
  • Print_ISBN
    0-7803-9562-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2006.1708253
  • Filename
    1708253
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2663008