Title :
Compact and Stress-Released Piston Tip-Tilt Mirror
Author :
Noell, W. ; Hugi, A. ; Overstolz, T. ; Waldis, S. ; Stanley, R. ; de Rooij, N.F.
Author_Institution :
Inst. of Microtechnol., Neuchatel Univ.
Abstract :
A compact stress-compensating micromirror design was fabricated and characterized that provides optically flat surfaces and large 3D displacement. Suitable applications are tunable optical-cavity devices (lasers, filters, etc.), beam steerers and scanners, and deformable mirrors
Keywords :
adaptive optics; beam steering; compensation; interference filters; laser cavity resonators; micro-optomechanical devices; micromirrors; optical design techniques; optical fabrication; optical scanners; 3D displacement; MEMS; beam steerers; compact stress-compensation; deformable mirrors; interference filters; micromirror design; mirror fabrication; optical flat surfaces; scanners; stress-released piston tip-tilt mirror; tunable lasers; tunable optical-cavity devices; Adaptive optics; Laser beams; Micromirrors; Mirrors; Optical devices; Optical filters; Optical interferometry; Pistons; Residual stresses; Tunable circuits and devices;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708254
