Title :
Vertical Resonant Comb Actuators for Fourier Transform Spectroscopy
Author :
Ataman, Caglar ; Urey, Hakan
Author_Institution :
Opt. Microsyst. Lab., Koc Univ., Sariyer
Abstract :
A Fourier transform spectrometer is implemented with resonant mode out-of-plane comb actuators which are used as movable diffraction gratings. 106 mum deflection is obtained at 28 V in ambient pressure at 1.2 KHz for a 3 mm clear aperture device
Keywords :
Fourier transform spectrometers; diffraction gratings; electrostatic actuators; infrared spectrometers; micro-optomechanical devices; visible spectrometers; 1.2 KHz; 106 micron; 28 V; 3 mm; Fourier transform spectroscopy; MEMS; aperture device; electrostatic comb drive actuation; movable diffraction gratings; vertical resonant comb actuators; Actuators; Apertures; Capacitance; Fingers; Fourier transforms; Frequency; Micromechanical devices; Resonance; Spectroscopy; Spine;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708256
