Recent advances in technology and applications of microsystems

Author

de Rooij, N.F.

Author_Institution

Inst. of Microtechnol., Neuchatel Univ., Switzerland

Volume

3

fYear

1994

fDate

5-9 Sep 1994

Firstpage

1488

Abstract

A short overview will be given concerning advances in micromachining technology, including surface and bulk silicon micromachining, galvano-deposition and bonding techniques. Following this short overview, a number of examples dealing with the design, fabrication and application of microsystems will be presented. In particular the following microsystems will be discussed in detail: 1. Miniaturized chemical analysis systems; 2. Blood-gas monitoring microsystems; 3. Scanning probe microsystems; 4. Electrostatic wobble motors; 5. Microelectromechanical switching devices

Keywords

chemical sensors; electroplating; micromachining; micromechanical devices; microsensors; blood-gas monitoring microsystems; bonding techniques; bulk silicon micromachining; electrostatic wobble motors; galvano-deposition; microelectromechanical switching devices; microsystems; miniaturized chemical analysis systems; scanning probe microsystems; surface micromachining; Biomembranes; Bonding; Chemical analysis; Chemical technology; Fabrication; Lithography; Micromachining; Microstructure; Monitoring; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Industrial Electronics, Control and Instrumentation, 1994. IECON '94., 20th International Conference on

Conference_Location

Bologna

Print_ISBN

0-7803-1328-3

Type

conf

DOI

10.1109/IECON.1994.398034

Filename

398034