Title :
MEMS Scanning Diffraction Grating Spectrometer
Author :
Kim, B. ; Sinibaldi, J. ; Karunasiri, G.
Author_Institution :
Naval Postgraduate Sch., Monterey, CA
Abstract :
A new type of grating spectroscopy, using a micromachined scanning grating spectrometer is presented. We achieve resolution of 17-70 nm in the spectroscopy using a HeNe laser as a source
Keywords :
diffraction gratings; gas lasers; helium; infrared spectrometers; micro-optomechanical devices; micromachining; neon; visible spectrometers; He-Ne; HeNe laser source; MEMS; grating spectroscopy; micromachined scanning diffraction grating spectrometer; spectroscopy resolution; Adaptive optics; Detectors; Diffraction gratings; Electrodes; Gold; Light sources; Micromechanical devices; Optical arrays; Optical modulation; Spectroscopy;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708257
