Title :
High Fill-Factor Arrays of Flexure Hinge Type Micromirrors for Multi Object Spectroscopy
Author :
Waldis, S. ; Clerc, P.-A. ; Noell, W. ; Zickar, M. ; de Rooij, N.F. ; Zamkotsian, F.
Author_Institution :
Inst. of Microtechnol., Neuchatel Univ.
Abstract :
Micromirror arrays have been fabricated dedicated to astronomical instrumentation. The 100times200 mum2 sized micromirrors show an excellent optical surface quality and can be electrostatically tilted by 20deg. A system of multiple landing beams have been implemented, which forces uniform tilt angle
Keywords :
astronomical spectra; astronomical techniques; astronomical telescopes; infrared spectroscopy; micro-optomechanical devices; micromirrors; optical arrays; 100 micron; 200 micron; MEMS; astronomical instrumentation; electrostatic tilting; fill-factor; flexure-hinge type micromirror array; infrared spectrometers; micromirror array fabrication; multiobject spectroscopy; multiple landing beams; optical surface quality; telescopes; Cryogenics; Electrodes; Etching; Fasteners; Micromirrors; Mirrors; Optical recording; Silicon on insulator technology; Spectroscopy; Telescopes;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708258
