Integrated Micro-Displacement Sensor that can Measure Tilting or Linear Motion for an External Mirror

Author

Sawada, R. ; Higurashi, E. ; Sanada, S. ; Chino, D. ; Ishikawa, I.

Author_Institution

Dept. of Intelligent Machinery & Syst., Kyushu Univ., Fukuoka

fYear

2006

fDate

21-24 Aug. 2006

Firstpage

52

Lastpage

53

Abstract

An integrated optical micro-displacement sensor was developed that uses the beam diverging from a vertical cavity surface emitting laser (VCSEL). The sensor consists of a VCSEL of 1.5 mmtimes1.5 mmtimes1 mm that is surrounded by three photodiodes. It can measure the linear distance traveled or the tilting angle for an external mirror. The resolution is 10 nm for a measurement range of 0.4 mm, or less than 40 nm for a wider measurement range of 1.8 mm. The full range of the measurable tilting angle is 5deg. The sensors can be incorporated into devices with micro-mirrors, such as integrated scanning microscopes

Keywords

angular measurement; integrated optics; micro-optomechanical devices; micromirrors; microsensors; motion measurement; optical sensors; photodiodes; semiconductor lasers; surface emitting lasers; 1 mm; 1.5 mm; VCSEL; beam divergence; external mirror; integrated optical microdisplacement sensor; integrated scanning microscopes; linear motion measurement; micromirrors; photodiodes; tilting measurement; vertical cavity surface emitting laser; Goniometers; Integrated optics; Laser beams; Mirrors; Motion measurement; Optical sensors; Photodiodes; Stimulated emission; Surface emitting lasers; Vertical cavity surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on

Conference_Location

Big Sky, MT

Print_ISBN

0-7803-9562-X

Type

conf

DOI

10.1109/OMEMS.2006.1708260

Filename

1708260