DocumentCode
2663253
Title
Impact of Micromirror Seidel Aberrations on Microcavity Spectra
Author
Liu, Wei ; Talghader, Joseph J.
Author_Institution
Dept. of Electr. & Comput. Eng., Minnesota Univ., Minneapolis, MN
fYear
2006
fDate
21-24 Aug. 2006
Firstpage
58
Lastpage
59
Abstract
The stress-induced deformation of micromirrors is examined in terms of common Seidel aberrations, and its impact on microcavity spectra is quantified. Tilt, curvature, and astigmatism cause characteristic changes in the spectra, but coma and spherical aberration are often negligible
Keywords
aberrations; deformation; infrared spectra; microcavities; micromirrors; astigmatism; coma; microcavity spectra; micromirror Seidel aberrations; spectral curvature; spectral tilt; spherical aberration; stress-induced deformation; Heating; Microcavities; Micromirrors; Mirrors; Optical interferometry; Reflectivity; Resonance; Shape; Tunable circuits and devices; Vision defects;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location
Big Sky, MT
Print_ISBN
0-7803-9562-X
Type
conf
DOI
10.1109/OMEMS.2006.1708263
Filename
1708263
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