Title :
Impact of Micromirror Seidel Aberrations on Microcavity Spectra
Author :
Liu, Wei ; Talghader, Joseph J.
Author_Institution :
Dept. of Electr. & Comput. Eng., Minnesota Univ., Minneapolis, MN
Abstract :
The stress-induced deformation of micromirrors is examined in terms of common Seidel aberrations, and its impact on microcavity spectra is quantified. Tilt, curvature, and astigmatism cause characteristic changes in the spectra, but coma and spherical aberration are often negligible
Keywords :
aberrations; deformation; infrared spectra; microcavities; micromirrors; astigmatism; coma; microcavity spectra; micromirror Seidel aberrations; spectral curvature; spectral tilt; spherical aberration; stress-induced deformation; Heating; Microcavities; Micromirrors; Mirrors; Optical interferometry; Reflectivity; Resonance; Shape; Tunable circuits and devices; Vision defects;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708263
