DocumentCode
2663315
Title
Integrated FET-Polysilicon Micromachining Process for Optical MEMS
Author
Cowan, W.D. ; Resnick, P.J. ; Okandan, M. ; Spahn, O.B. ; Dagel, D.J. ; Grossetette, G.D.
Author_Institution
Sandia Nat. Labs., Albuquerque, NM
fYear
2006
fDate
21-24 Aug. 2006
Firstpage
64
Lastpage
65
Abstract
Co-fabricated transistors in the SUMMiTtrade process enable large scale micromirror arrays with practical pin-out. Novel drive circuitry and optical/electrical performance for initial micromirror arrays are described
Keywords
field effect transistors; micro-optomechanical devices; micromachining; micromirrors; SUMMiTtrade process; co-fabricated transistors; drive circuitry; electrical performance; integrated FET-polysilicon micromachining process; micromirror arrays; optical MEMS; optical performance; Circuits; Electrodes; Etching; FETs; Integrated optics; Micromachining; Micromechanical devices; Micromirrors; Mirrors; Optical arrays;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location
Big Sky, MT
Print_ISBN
0-7803-9562-X
Type
conf
DOI
10.1109/OMEMS.2006.1708266
Filename
1708266
Link To Document