DocumentCode :
2663334
Title :
A Large Format Modified TEA CO2 Laser Based Process for Cost Effective Small Via Generation
Author :
Morrison, J.M. ; Tessier, T.G. ; Gu, B.
Author_Institution :
Motorola Inc., MA
fYear :
1994
fDate :
13-15 Apr 1994
Firstpage :
369
Lastpage :
377
Keywords :
Costs; Dielectric substrates; Glass manufacturing; Laminates; Laser ablation; Laser beams; Laser modes; Optical device fabrication; Structural beams; Throughput;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Multichip Modules, 1994. Proceedings of the 1994 International Conference on
Print_ISBN :
0-930815-39-4
Type :
conf
DOI :
10.1109/ICMCM.1994.753577
Filename :
753577
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2663334
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