• DocumentCode
    2663334
  • Title

    A Large Format Modified TEA CO2 Laser Based Process for Cost Effective Small Via Generation

  • Author

    Morrison, J.M. ; Tessier, T.G. ; Gu, B.

  • Author_Institution
    Motorola Inc., MA
  • fYear
    1994
  • fDate
    13-15 Apr 1994
  • Firstpage
    369
  • Lastpage
    377
  • Keywords
    Costs; Dielectric substrates; Glass manufacturing; Laminates; Laser ablation; Laser beams; Laser modes; Optical device fabrication; Structural beams; Throughput;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Multichip Modules, 1994. Proceedings of the 1994 International Conference on
  • Print_ISBN
    0-930815-39-4
  • Type

    conf

  • DOI
    10.1109/ICMCM.1994.753577
  • Filename
    753577
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2663334