Title :
CMOS-compatible Biological Surface Plasmon Resonance Nanosensor
Author :
Chyan, J.Y. ; Yeh, J. Andrew
Author_Institution :
Inst. of MicroElectroMechan. Syst., Nat. Tsing Hua Univ., Hsinchu
Abstract :
A CMOS-compatible chemical and biological SPR nanosensor is reported. This nanosensor is based on transmission-type surface plasmon resonance (SPR) spectroscopy and can create an effective platform for monitoring binding events on micro- or nano-patterned receptor arrays. It can be integrated with other electronic circuits using standard CMOS process to receive signals and to perform signal processing on one chip. The nanosensor provides a pathway to an extremely small, simple, light, disposable and ultrasensitive sensing chip for environmental and clinical diagnostic applications
Keywords :
CMOS image sensors; biosensors; chemical sensors; integrated optics; nanoelectronics; nanopatterning; optical information processing; optical sensors; surface plasmon resonance; CMOS image sensor; CMOS-compatible biological SPR nanosensor; CMOS-compatible chemical SPR nanosensor; clinical diagnostics; disposable ultrasensitive chip; environmental diagnostics; micro-patterned receptor arrays; nano-patterned receptor arrays; signal processing; transmission-type surface plasmon resonance spectroscopy; Array signal processing; CMOS process; Chemicals; Electronic circuits; Monitoring; Nanobioscience; Plasmons; Resonance; Signal processing; Spectroscopy;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708272
