Title :
Design and Fabrication of Optical MEMS Modulators with Silicon Wire Waveguide
Author :
Higo, Akio ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ.
Abstract :
This paper presents design presents design and theoretical analysis of a silicon optical waveguide modulator with an electrostatic micromechanical structure actuated in the evanescent range over a silicon wire waveguide
Keywords :
electrostatic actuators; elemental semiconductors; micro-optomechanical devices; optical design techniques; optical fabrication; optical modulation; optical waveguide components; silicon; Si; electrostatic micromechanical structure; evanescent field; optical MEMS modulator design; optical MEMS modulator fabrication; silicon wire optical waveguide modulator; Electrostatic analysis; Micromechanical devices; Optical design; Optical device fabrication; Optical modulation; Optical surface waves; Optical waveguide theory; Optical waveguides; Silicon; Wire;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708273
