Title :
An All Silicon Micro-Machined Add-Drop Optical Filter
Author :
Saadany, B. ; Khalil, D. ; Malak, M. ; Kubota, M. ; Marty, F. ; Mita, Y. ; Bourouina, T.
Author_Institution :
ESIEE/Esycom-Lab, Noisy-le-Grand
Abstract :
In this paper, all silicon optical add-drop filter is presented, where a tilted 45deg Bragg mirror acts as a wavelength selective reflector. The 45deg configuration allows the add and drop of the desired wavelengths simultaneously. The Bragg mirrors are realized by deep-reactive-ion-etching (DRIE) of the silicon substrate thus producing successive vertical Si/air interfaces. The fabricated devices, as well as the measured characteristics are presented
Keywords :
distributed Bragg reflectors; elemental semiconductors; micro-optomechanical devices; micromachining; optical communication equipment; optical fabrication; optical filters; optical testing; silicon; sputter etching; wavelength division multiplexing; Bragg mirror; Si; WDM; add-drop filter response measurement; deep-reactive-ion-etching; silicon micro-machined add-drop optical filter; vertical Si-air interfaces; wavelength selective reflector; Costs; Mirrors; Optical fiber devices; Optical fiber filters; Optical fiber subscriber loops; Optical filters; Resonance; Silicon; Wavelength division multiplexing; Wavelength measurement;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708281
