Title :
Rotary Comb Drive Actuator with an Optical Fiber Encoder
Author :
Nagao, Shinya ; Oohira, Fumikazu ; Hosogi, Maho ; Hashiguchi, Gen
Author_Institution :
Dept. of Intelligent Mech. Syst. Eng., Kagawa Univ., Takamatsu
Abstract :
We propose the rotary type electrostatic comb drive actuator with a sensor scale for an optical fiber encoder. This actuator can be expected to measure the amount of the movement of the actuator precisely by using the optical fiber encoder
Keywords :
electrostatic actuators; encoding; micro-optomechanical devices; optical fibres; electrostatic comb drive actuator; optical fiber encoder; Electrostatic actuators; Electrostatic measurements; Etching; Intelligent actuators; Optical detectors; Optical fiber sensors; Optical fibers; Optical sensors; Pneumatic actuators; Resists;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708283
