Title :
A Large Rotation Angle Electrothermal Micromirror with Integrated Platinum Heater
Author :
Wu, Lei ; Xie, Huikai
Author_Institution :
Dept. of Electr. & Comput. Eng., Florida Univ., Gainesville, FL
Abstract :
We report a single-crystal-silicon electrothermal micromirror with an integrated platinum heater. A large rotation angle of 124deg has been achieved at a dc voltage of 12.5 V. The resonant frequency of the device is 336 Hz
Keywords :
elemental semiconductors; micro-optomechanical devices; micromirrors; optical design techniques; platinum; silicon; 12.5 V; 336 Hz; integrated platinum heater; single-crystal-silicon electrothermal micromirror; Electrothermal effects; Etching; Fabrication; Heat engines; Micromirrors; Mirrors; Platinum; Resistance heating; Silicon; Voltage;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708287
