DocumentCode
2663693
Title
Micromirror with Thin Film Torsion Bar and Vertical Comb using Tensile Poly-Si
Author
Fujishima, Masayuki ; Sasaki, Minoru ; Hane, Kazuhiro
Author_Institution
Dept. of Nanomech., Tohoku Univ., Sendai
fYear
2006
fDate
21-24 Aug. 2006
Firstpage
108
Lastpage
109
Abstract
A microminor device is developed using the tensile poly-Si thin film. The compliant torsion bar and the vertical comb are prepared. The large stress can be obtained by the crystallization of amorphous Si (a-Si) film. Si film has the same thermal expansion coefficient with that of the substrate. This will stabilize the temperature characteristics
Keywords
electrostatic actuators; micro-optomechanical devices; micromirrors; Si; electrostatic driving; micromirror; tensile poly-Si thin film; thermal expansion coefficient; thin film torsion bar; vertical comb; Amorphous materials; Crystallization; Micromirrors; Semiconductor films; Substrates; Tensile stress; Thermal expansion; Thermal stresses; Thin film devices; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location
Big Sky, MT
Print_ISBN
0-7803-9562-X
Type
conf
DOI
10.1109/OMEMS.2006.1708288
Filename
1708288
Link To Document