Title :
Micromirror with Thin Film Torsion Bar and Vertical Comb using Tensile Poly-Si
Author :
Fujishima, Masayuki ; Sasaki, Minoru ; Hane, Kazuhiro
Author_Institution :
Dept. of Nanomech., Tohoku Univ., Sendai
Abstract :
A microminor device is developed using the tensile poly-Si thin film. The compliant torsion bar and the vertical comb are prepared. The large stress can be obtained by the crystallization of amorphous Si (a-Si) film. Si film has the same thermal expansion coefficient with that of the substrate. This will stabilize the temperature characteristics
Keywords :
electrostatic actuators; micro-optomechanical devices; micromirrors; Si; electrostatic driving; micromirror; tensile poly-Si thin film; thermal expansion coefficient; thin film torsion bar; vertical comb; Amorphous materials; Crystallization; Micromirrors; Semiconductor films; Substrates; Tensile stress; Thermal expansion; Thermal stresses; Thin film devices; Transistors;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708288
