Title :
Thermo-Mechanical Detector Array with Optical Readout
Author :
Torun, H. ; Ferhanoglu, O. ; Urey, H.
Author_Institution :
Opt. Microsyst. Lab., Koc Univ., Istanbul
Abstract :
An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures that bend in response to thermal change. A diffraction grating placed underneath each pixel allows sensing sub-nm mechanical deflections
Keywords :
diffraction gratings; infrared detectors; micromechanical devices; optical arrays; optical design techniques; MEMS bimaterial structure; NETD; diffraction grating; mechanical deflection; noise equivalent temperature difference; optical readout; thermo-mechanical detector array; Diffraction gratings; Optical arrays; Optical detectors; Optical diffraction; Optical interferometry; Optical noise; Optical sensors; Sensor arrays; Silicon compounds; Thermomechanical processes;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708290
