AR-CM NCTF Control for Precision Positioning Systems -- Concept and Results

This paper describes the concept and application of the Acceleration Reference Continuous Motion nominal characteristic trajectory following (AR-CM NCTF) control to a non-contact mechanism, a simple and typical positioning mechanism. The AR-CM NCTF control is an improved version of the Continuous Motion NCTF (CM NCTF) control, in order to enhance the following characteristic of the object motion on nominal characteristic trajectory and improve the positioning and tracking accuracies of a system. It provides the advantages such as the high overshoot reduction characteristics and the low sensitivity disturbance. The basic concept and practical design procedure of the controller are introduced. The effectiveness and advantages of the AR-CM NCTF control are shown in the experimental positioning and tracking control results, in comparison with CM NCTF control.