Title :
High-Reflectivity Two-Axis Vertical Comb Drive Microscanners for Confocal Imaging Applications
Author :
Kumar, Karthik ; Hoshino, Kazunori ; Shin, Hyun-Joon ; Richards-Kortum, Rebecca ; Zhang, Xiaojing
Author_Institution :
Dept. of Biomed. Eng., Texas Univ., Austin, TX
Abstract :
We present 500times700 mum metal-coated scanning micromirrors fabricated from bonded SOI-Si wafers with ~90% reflectivity at 633 nm. Confocal images with 1 mum resolution were generated using single axis actuation of plusmn2.5deg at 1.87 KHz
Keywords :
biomedical optical imaging; cellular biophysics; elemental semiconductors; image scanners; micromirrors; optical fabrication; optical scanners; reflectivity; silicon; silicon-on-insulator; 1.87 KHz; 633 nm; Si; Si-SiO2; bonded SOI-Si wafers; metal-coated scanning micromirrors fabrication; reflectivity; subcellular scale confocal imaging; vertical combdrive microscanners; Etching; Image resolution; Mirrors; Optical films; Optical imaging; Optical surface waves; Protection; Reflectivity; Stators; Wafer bonding;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708294
