• DocumentCode
    2663894
  • Title

    Micromirror Array of Monocrystalline Silicon

  • Author

    Bakke, Thor ; Völker, Benjamin ; Friedrichs, Martin ; Rudloff, Dirk

  • Author_Institution
    Fraunhofer Inst. for Photonic Microsyst., Dresden
  • fYear
    2006
  • fDate
    21-24 Aug. 2006
  • Firstpage
    128
  • Lastpage
    129
  • Abstract
    A 240times281 array of micromirrors made of monocrystalline silicon is presented. The absence of stress gradients makes it possible to achieve mirrors of unsurpassed planarity and the high elasticity of silicon allows creep free actuation
  • Keywords
    creep; elasticity; elemental semiconductors; micromirrors; silicon; creep free actuation; elasticity; micromirror array; monocrystalline silicon; stress gradients; unsurpassed planarity; CMOS process; Electrodes; Micromirrors; Mirrors; Optical modulation; Polymers; Reflectivity; Silicon; Stress; Wafer bonding;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
  • Conference_Location
    Big Sky, MT
  • Print_ISBN
    0-7803-9562-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2006.1708298
  • Filename
    1708298
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2663894