Title :
Silicon-Based On-Chip Micromirrors for DWDM Wavelength-Selective Crossconnects
Author :
Chi, Chao-Hsi ; Hou, Chenlu ; Lee, Chi-Hung ; Hah, Dooyoung ; Wu, Ming C.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA
Abstract :
We report on a silicon-based on-chip micromirror array for monolithic wavelength-selective crossconnects. The 75-mum mirror pitch matches to the DWDM grids with 100 GHz spacing. A maximum mechanical scan angle of 6.5 degree has been achieved
Keywords :
channel spacing; elemental semiconductors; micro-optomechanical devices; microactuators; micromirrors; optical interconnections; optical switches; silicon; wavelength division multiplexing; 100 GHz; 75 micron; DWDM grids; MEMS; channel spacing; comb-drive actuator; monolithic wavelength-selective crossconnects; planar lightwave circuits; silicon-based on-chip micromirrors; Channel spacing; Circuits; Etching; Fingers; Micromechanical devices; Micromirrors; Mirrors; Programmable control; Springs; Wavelength division multiplexing;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708299
