• DocumentCode
    2663941
  • Title

    A Micromirror with Large Static Rotation and Piston Actuation

  • Author

    Chiou, J.C. ; Kuo, C.F. ; Lin, Y.J. ; Shieh, H.-P.D.

  • Author_Institution
    Dept. of Electr. & Control Eng., Nat. Chiao Tung Univ., Hsinchu
  • fYear
    2006
  • fDate
    21-24 Aug. 2006
  • Firstpage
    132
  • Lastpage
    133
  • Abstract
    A micromirror with large static rotation and piston actuation is developed, and the design, fabrication and measurement result are also presented. The present micromirror device was fabricated through commercial available polyMUMPs
  • Keywords
    microactuators; micromirrors; optical design techniques; optical fabrication; pistons; large static rotation; micromirror; piston actuation; polyMUMP fabrication techniques; Actuators; Displays; Fingers; Micromechanical devices; Micromirrors; Optical device fabrication; Optical microscopy; Pistons; Principal component analysis; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
  • Conference_Location
    Big Sky, MT
  • Print_ISBN
    0-7803-9562-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2006.1708300
  • Filename
    1708300
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2663941