Title :
A Micromirror with Large Static Rotation and Piston Actuation
Author :
Chiou, J.C. ; Kuo, C.F. ; Lin, Y.J. ; Shieh, H.-P.D.
Author_Institution :
Dept. of Electr. & Control Eng., Nat. Chiao Tung Univ., Hsinchu
Abstract :
A micromirror with large static rotation and piston actuation is developed, and the design, fabrication and measurement result are also presented. The present micromirror device was fabricated through commercial available polyMUMPs
Keywords :
microactuators; micromirrors; optical design techniques; optical fabrication; pistons; large static rotation; micromirror; piston actuation; polyMUMP fabrication techniques; Actuators; Displays; Fingers; Micromechanical devices; Micromirrors; Optical device fabrication; Optical microscopy; Pistons; Principal component analysis; Voltage;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708300
