Title :
Characterization of Silicon Nitride Micromachined Beams via Remote Optical Interrogation
Author :
Shelton, W. Andrew ; Muth, John F. ; Holland, Jonathan L. ; Lunardi, Leda M.
Author_Institution :
Dept. of Electr. & Comput. Eng., North Carolina State Univ., Raleigh, NC
Abstract :
We demonstrate that mechanical characterization of the motion of micromachined double- clamped silicon nitride beams is possible via remote optical interrogation. Using Fabry-Perot interferometry, information about the absolute displacement and resonant frequency of various mechanical modes is determined
Keywords :
Fabry-Perot interferometers; laser cavity resonators; measurement by laser beam; micro-optics; micromachining; micromechanical devices; silicon compounds; Fabry-Perot interferometry; SiN; absolute displacement; mechanical mode characterization; micromachined double-clamped silicon nitride beams; remote optical interrogation; resonant frequency; Fabry-Perot; Laser beams; Laser tuning; Microcavities; Optical beams; Optical films; Optical interferometry; Optical sensors; Optical signal processing; Silicon;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708303
