Title :
A New Method for Microlens Fabricated by a Heating Compressed Air Process
Author :
Lin, Chewei ; Tsou, Chingfu
Author_Institution :
Dept. of Autom. Control Eng., Feng Chia Univ., Taichung
Abstract :
This paper reports a fabrication provides new method to fabricate microlens molding on silicon substrate by a heating compressed air process. The fabrication provides and alternative way to manufacture microlens molding with good surface roughness
Keywords :
heating; microlenses; moulding; optical fabrication; silicon; surface roughness; Si; compressed air heating process; microlens fabrication; microlens molding; silicon substrate; surface roughness; Fabrication; Heating; Lenses; Microoptics; Optical arrays; Optical refraction; Optical sensors; Resists; Sensor arrays; Silicon;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708307
