DocumentCode
2664054
Title
Two Dimensional MEMS Piston Array for DUV Optical Pattern Generation
Author
López, D. ; Aksyuk, V. ; Watson, G. ; Simon, M.E. ; Mansfield, W. ; Klemens, F. ; Cirelli, R. ; Ferry, E. ; Papazian, A. ; Pardo, F. ; Bolle, C. ; Basavanhally, N. ; Bower, J. ; Miner, J. ; Sorsch, T. ; Tennant, D.
Author_Institution
Lucent Technol., Bell Labs., Murray Hill, NJ
fYear
2006
fDate
21-24 Aug. 2006
Firstpage
148
Lastpage
149
Abstract
We describe the design, fabrication and dynamics of a two dimensional array of MEMS piston mirrors that fulfil the requirements needed to modulate deep ultraviolet radiation for mask pattern generation
Keywords
micro-optomechanical devices; micromirrors; optical arrays; optical design techniques; optical fabrication; pistons; DUV; MEMS piston mirrors; deep ultraviolet radiation; mask pattern generation; optical design; optical fabrication; optical pattern generation; two dimensional MEMS piston array; Electrodes; Fabrication; Lithography; Micromechanical devices; Mirrors; Optical arrays; Optical modulation; Pistons; Springs; Throughput;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location
Big Sky, MT
Print_ISBN
0-7803-9562-X
Type
conf
DOI
10.1109/OMEMS.2006.1708308
Filename
1708308
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