Title :
Two Dimensional MEMS Piston Array for DUV Optical Pattern Generation
Author :
López, D. ; Aksyuk, V. ; Watson, G. ; Simon, M.E. ; Mansfield, W. ; Klemens, F. ; Cirelli, R. ; Ferry, E. ; Papazian, A. ; Pardo, F. ; Bolle, C. ; Basavanhally, N. ; Bower, J. ; Miner, J. ; Sorsch, T. ; Tennant, D.
Author_Institution :
Lucent Technol., Bell Labs., Murray Hill, NJ
Abstract :
We describe the design, fabrication and dynamics of a two dimensional array of MEMS piston mirrors that fulfil the requirements needed to modulate deep ultraviolet radiation for mask pattern generation
Keywords :
micro-optomechanical devices; micromirrors; optical arrays; optical design techniques; optical fabrication; pistons; DUV; MEMS piston mirrors; deep ultraviolet radiation; mask pattern generation; optical design; optical fabrication; optical pattern generation; two dimensional MEMS piston array; Electrodes; Fabrication; Lithography; Micromechanical devices; Mirrors; Optical arrays; Optical modulation; Pistons; Springs; Throughput;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708308
