Title :
Spatial Light Modulators for Maskless Lithography
Author :
Jung, Il Woong ; Wang, Jen-Shiang ; Solgaard, Olav
Author_Institution :
Dept. of Electr. Eng., Stanford Univ., CA
Abstract :
We present a piston-type SLM (spatial light modulator) as a programmable pattern generator for maskless lithography. Large arrays of up to ~40,000 mirrors with 20 mum pixels have been fabricated. The mirrors have high resonance frequencies (f=564 kHz), and achieve deflections of lambda/2 for actuation voltages <100 V. Using the SLM in a simple imaging system, we demonstrate the generation of aerial images of dark line patterns
Keywords :
micromirrors; optical arrays; optical design techniques; optical fabrication; optical images; photolithography; pistons; spatial light modulators; 564 kHz; aerial image generation; maskless lithography; micromirrors; mirror arrays; optical fabrication; piston-type spatial light modulators; programmable pattern generator; resonance frequencies; Actuators; Electrodes; Lithography; Micromirrors; Mirrors; Optical device fabrication; Optical modulation; Pistons; Rough surfaces; Surface roughness;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708309
