Title :
Single-Crystal-Silicon Continuous Membrane Deformable Mirror Array for Adaptive Optics
Author :
Il Woong Jung ; Peter, Yves-Alain ; Carr, Emily ; Jen-Shiang Wang ; Solgaard, Olav
Author_Institution :
Dept. of Electr. Eng., Stanford Univ., CA
Abstract :
We present a single-crystal-silicon (SCS) continuous membrane deformable minor array with applications as a corrective adaptive optics element for space-based telescopes. The continuous membrane is made from a thin silicon-on-insulator (SOI) layer with good optical surface quality. The membrane is able to deform locally by 125 nm at 100 V with a resonance frequency of 25 kHz
Keywords :
adaptive optics; membranes; micromechanical devices; micromirrors; optical arrays; optical fabrication; silicon-on-insulator; space research; telescopes; 100 V; 125 nm; 25 kHz; Si; adaptive optics; deformable mirror array; optical surface quality; resonance frequency; single-crystal-silicon continuous membrane MEMS; space-based telescopes; thin silicon-on-insulator layer; Adaptive arrays; Adaptive optics; Biomembranes; Electrodes; Fabrication; Micromechanical devices; Mirrors; Optical arrays; Optical distortion; Springs;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708310
