Title :
MEMS Mirror Arrays for Adaptive Optics Applications
Author :
Spahn, O.B. ; Cowan, W.D. ; Dagel, D.J. ; Resnick, P.J. ; Jokiel, B. ; Grossetette, G.D.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM
Abstract :
A high fill-factor 61-element array containing 0.5 mm hexagonal mirrors that tip, tilt and piston with a 27 mum stroke has been fabricated in SUMMiT Vtrade technology. Design, fabrication and performance will be discussed
Keywords :
micromechanical devices; micromirrors; optical arrays; optical design techniques; optical fabrication; 0.5 mm; 61-element array; MEMS mirror arrays; SUMMiT Vtrade technology; adaptive optics; mirror fabrication; optical design; Actuators; Adaptive arrays; Adaptive optics; Laboratories; Metallization; Micromechanical devices; Mirrors; Optical arrays; Pistons; Space technology;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708311
