Title :
Piezoelectric Deformable MEMS Mirror for Adaptive Optics Composed of PZT Thin Films
Author :
Kanno, Isaku ; Kunisawa, Takaaki ; Kotera, Hidetoshi
Author_Institution :
Micro Eng., Kyoto Univ.
Abstract :
In this paper we present the piezoelectric-driven deformable mirror for adaptive optics (AO). The deformable mirror, which is used to correct the disturbed wave front, is composed of a piezoelectric PZT film deposited on a SOI substrate. The mirror membrane of 15 mm in diameter was fabricated by etching the handle wafer, while the exposed oxide layer was coated by Al layer as a mirror surface. The individual Al electrodes were deposited on the PZT film to accomplish 19 PZT/Si unimorph actuator array. The dynamic deformation of the mirror was measured by a laser Doppler vibrometer and the large displacement more than 5 mum was obtained by the application of low voltage of 10 V. The deformation of the mirror according to Zernike´s polynomials was examined and mirror surface to 3rd order Zernike modes could be generated
Keywords :
Zernike polynomials; adaptive optics; aluminium; etching; measurement by laser beam; micromirrors; piezoelectric thin films; silicon-on-insulator; vibration measurement; 10 V; 15 mm; Al; PZT; PZT thin films; PbZrO3TiO3; SOI substrate; Si-SiO2; Zernike modes; Zernike polynomials; adaptive optics; aluminium electrodes; aluminium layer; dynamic deformation; etching; laser Doppler vibrometer; mirror membrane; mirror surface; oxide layer; piezoelectric deformable MEMS mirror; piezoelectric film; unimorph actuator array; wave front correction; Adaptive optics; Biomembranes; Electrodes; Etching; Micromechanical devices; Mirrors; Optical films; Optical surface waves; Piezoelectric films; Substrates;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708312
