Nanolaminate Deformable Mirrors

Author

Papavasiliou, Alexandros P. ; Olivier, Scot S. ; Barbee, Troy W. ; Miles, Robin R. ; Walton, C.C. ; Cohn, Michael B. ; Chang, Kuo-Pin

Author_Institution

Lawrence Livermore Nat. Lab., CA

fYear

2006

fDate

21-24 Aug. 2006

Firstpage

158

Lastpage

159

Abstract

The paper describes two similar deformable mirrors that will demonstrate the feasibility of nanolaminate-based deformable mirrors over a wide range of size scales. Two complementary technologies: high-spatial-density electrostatic actuators and thin, flexible, lightweight nanolaminate foils are combined. Electrostatic actuation of MEMS-like structures provides densely-spaced, repeatable deflections on the order of 10 mum. Nanolaminate foils provide a mirror surface that is simultaneously flexible enough to deform under electrostatic forces and tough enough to survive handling and bonding

Keywords

electrostatic actuators; foils; laminates; micro-optomechanical devices; mirrors; nanostructured materials; MEMS-like structures; densely-spaced deflections; electrostatic actuation; electrostatic forces; high-spatial-density electrostatic actuators; lightweight nanolaminate foils; mirror surface; nanolaminate deformable mirrors; Electrodes; Electrostatic actuators; Fabrication; Laboratories; Large-scale systems; Microassembly; Micromechanical devices; Mirrors; Space technology; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on

Conference_Location

Big Sky, MT

Print_ISBN

0-7803-9562-X

Type

conf

DOI

10.1109/OMEMS.2006.1708313

Filename

1708313