Title :
Focus Tracking in Time Domain Optical Coherence Tomography using Membrane Mirrors Operated Near Snap-Down
Author :
Dickensheets, David L. ; Overcast, Marshall ; Himmer, Phillip ; Yang, Victor X.D. ; Vitkin, I.Alex
Author_Institution :
Electr. & Comput. Eng. Dept., Montana State Univ., Bozeman, MT
Abstract :
We describe MEMS membrane mirrors for dynamic focus tracking in time-domain OCT. We demonstrate stable, distortion-compensated nearly sinusoidal motion at 10 kHz at an amplitude of 50% of the air gap
Keywords :
bioMEMS; biomedical optical imaging; micro-optomechanical devices; micromirrors; optical tomography; 10 kHz; MEMS membrane mirrors; distortion-compensation; focus tracking; sinusoidal motion; time domain optical coherence tomography; time-domain OCT; Biomedical optical imaging; Biomembranes; Focusing; Micromechanical devices; Mirrors; Optical distortion; Optical imaging; Optical interferometry; Time domain analysis; Tomography;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708319