• DocumentCode
    2664507
  • Title

    A micromachined 10 GHz meander dipole antenna on high resistivity silicon substrate for remote sensing applications

  • Author

    Ibrahim, Amr ; Cumming, D.R.S.

  • Author_Institution
    Dept. of Electron. & Electr. Eng., Univ. of Glasgow, Glasgow, UK
  • fYear
    2009
  • fDate
    16-17 Nov. 2009
  • Firstpage
    345
  • Lastpage
    347
  • Abstract
    The study of a 10 GHz miniaturized printed antenna using a high resistivity silicon substrate is presented. The choice of antenna is a meandered dipole, with a length of 4.25 mm, allowing a reduction of the chip area to (5 × 4) mm2. By etching the silicon substrate using DRIE-etching techniques, a (1.4 × 1.4) mm2 membrane was fabricated for sensing purposes and to enhance the impedance matching of the antenna. Post fabrications experiments were monitored, and results showed an improvement in antenna return loss and bandwidth, achieving -28 dB and 43% at 10 GHz.
  • Keywords
    dipole antennas; etching; microstrip antennas; remote sensing; DRIE-etching; dipole antenna; high resistivity silicon substrate; micromachined meander; miniaturized printed antenna; remote sensing; Bandwidth; Biomembranes; Conductivity; Dipole antennas; Etching; Fabrication; Impedance matching; Monitoring; Remote sensing; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Antennas & Propagation Conference, 2009. LAPC 2009. Loughborough
  • Conference_Location
    Loughborough
  • Print_ISBN
    978-1-4244-2720-8
  • Electronic_ISBN
    978-1-4244-2721-5
  • Type

    conf

  • DOI
    10.1109/LAPC.2009.5352506
  • Filename
    5352506
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2664507