Title :
A micromachined 10 GHz meander dipole antenna on high resistivity silicon substrate for remote sensing applications
Author :
Ibrahim, Amr ; Cumming, D.R.S.
Author_Institution :
Dept. of Electron. & Electr. Eng., Univ. of Glasgow, Glasgow, UK
Abstract :
The study of a 10 GHz miniaturized printed antenna using a high resistivity silicon substrate is presented. The choice of antenna is a meandered dipole, with a length of 4.25 mm, allowing a reduction of the chip area to (5 × 4) mm2. By etching the silicon substrate using DRIE-etching techniques, a (1.4 × 1.4) mm2 membrane was fabricated for sensing purposes and to enhance the impedance matching of the antenna. Post fabrications experiments were monitored, and results showed an improvement in antenna return loss and bandwidth, achieving -28 dB and 43% at 10 GHz.
Keywords :
dipole antennas; etching; microstrip antennas; remote sensing; DRIE-etching; dipole antenna; high resistivity silicon substrate; micromachined meander; miniaturized printed antenna; remote sensing; Bandwidth; Biomembranes; Conductivity; Dipole antennas; Etching; Fabrication; Impedance matching; Monitoring; Remote sensing; Silicon;
Conference_Titel :
Antennas & Propagation Conference, 2009. LAPC 2009. Loughborough
Conference_Location :
Loughborough
Print_ISBN :
978-1-4244-2720-8
Electronic_ISBN :
978-1-4244-2721-5
DOI :
10.1109/LAPC.2009.5352506
