High quality factor lithium niobate electrostrictive HBAR resonators

Author

Pijolat, M. ; Deguet, C. ; Billard, C. ; Mercier, D. ; Reinhardt, A. ; Aïd, M. ; Defay, E. ; Ballandras, S.

Author_Institution

CEA, LETI, Grenoble, France

fYear

2011

fDate

2-5 May 2011

Firstpage

1

Lastpage

3

Abstract

Electrostrictive acoustic resonators have been widely investigated during the last 8 years. Despite their interesting dc-controlled electromechanical coupling and switchable properties, the main drawback remains their poor quality factor. Here we show that HBAR LiNbO3 single crystals can be useful to act as high quality factor switchable resonators thanks to their electrostrictive properties and to their intrinsic low acoustic losses. For a resonance frequency at 1.95GHz, HBAR Q reaches 9000. This outstanding behaviour could be of interest for RF applications.

Keywords

acoustic resonators; bulk acoustic wave devices; crystal resonators; electroactive polymer actuators; lithium compounds; LiNbO₃; frequency 1.95 GHz; high quality factor lithium niobate electrostrictive HBAR resonators; low acoustic losses; resonance frequency; Acoustics; Crystals; Electrostriction; Q factor; Resonant frequency; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control and the European Frequency and Time Forum (FCS), 2011 Joint Conference of the IEEE International

Conference_Location

San Fransisco, CA

ISSN

1075-6787

Print_ISBN

978-1-61284-111-3

Type

conf

DOI

10.1109/FCS.2011.5977743

Filename

5977743