A demonstration system based on a fuzzy logic controller

Author

Godfrey, Nowell ; Li, Hua ; Marcy, William

Author_Institution

Comput. Sci. Dept., Texas Tech Univ., Lubbock, TX, USA

fYear

1993

fDate

4-6 Oct 1993

Firstpage

450

Lastpage

453

Abstract

In the semiconductor manufacturing industry, many systems to be controlled are highly nonlinear and dynamic. A demonstration project, real-time control of a beam balancing system based on fuzzy logic, is described. This prototyping system can be operated automatically by the execution of a fuzzy control algorithm. Unlike most of the conventional and optimal control algorithms, this fuzzy logic controller requires no explicit system parameters. It is characterized by its simplicity and robustness

Keywords

control system synthesis; electronics industry; fuzzy control; intelligent control; nonlinear control systems; optimal control; process control; real-time systems; robust control; three-term control; PID control; beam balancing system; control program; demonstration system; fuzzy control algorithm; fuzzy logic controller; intelligent control; intelligent manufacturing; nonlinear system; prototyping system; real-time control; robustness; semiconductor manufacturing; Automatic control; Control systems; Fuzzy control; Fuzzy logic; Manufacturing industries; Nonlinear control systems; Nonlinear dynamical systems; Optimal control; Prototypes; Real time systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Manufacturing Technology Symposium, 1993, Fifteenth IEEE/CHMT International

Conference_Location

Santa Clara, CA

Print_ISBN

0-7803-1424-7

Type

conf

DOI

10.1109/IEMT.1993.398166

Filename

398166