DocumentCode
2665240
Title
Green-color EL device with sputtered ZnS:TbOF thin films
Author
Ohnishi, H. ; Okamoto, Kenj I.
Author_Institution
Fac. of Eng., Ehime Univ., Japan
fYear
1988
fDate
4-6 Oct. 1988
Firstpage
32
Lastpage
35
Abstract
A green-color AC electroluminescent device with ZnS:TbOF thin films has been fabricated by diode RF-sputtering. The effect of oxygen doping and sputtering conditions on the device performance has been investigated. It has been found that the performance improvement can be achieved by codoping oxygen into the active layers.<>
Keywords
II-VI semiconductors; electroluminescent displays; sputtered coatings; thin film devices; zinc compounds; II-VI semiconductors; ZnS:TbOF; diode RF-sputtering; electroluminescent display; green-color AC electroluminescent device; Diodes; Doping; Electroluminescent devices; Energy exchange; Insulation; Powders; Sputtering; Substrates; Thin film devices; Zinc compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Display Research Conference, 1988., Conference Record of the 1988 International
Conference_Location
San Diego, CA, USA
Type
conf
DOI
10.1109/DISPL.1988.11269
Filename
11269
Link To Document