Title :
Green-color EL device with sputtered ZnS:TbOF thin films
Author :
Ohnishi, H. ; Okamoto, Kenj I.
Author_Institution :
Fac. of Eng., Ehime Univ., Japan
Abstract :
A green-color AC electroluminescent device with ZnS:TbOF thin films has been fabricated by diode RF-sputtering. The effect of oxygen doping and sputtering conditions on the device performance has been investigated. It has been found that the performance improvement can be achieved by codoping oxygen into the active layers.<>
Keywords :
II-VI semiconductors; electroluminescent displays; sputtered coatings; thin film devices; zinc compounds; II-VI semiconductors; ZnS:TbOF; diode RF-sputtering; electroluminescent display; green-color AC electroluminescent device; Diodes; Doping; Electroluminescent devices; Energy exchange; Insulation; Powders; Sputtering; Substrates; Thin film devices; Zinc compounds;
Conference_Titel :
Display Research Conference, 1988., Conference Record of the 1988 International
Conference_Location :
San Diego, CA, USA
DOI :
10.1109/DISPL.1988.11269
