Title :
A work cell manufacturing system for VLSI fabrication
Author :
Ruey-Shan Gul ; Slama, Mike ; Griffin, Ralph ; Holman, Ken
Author_Institution :
Nat. Semicond. Corp., Santa Clara, CA, USA
Abstract :
The concepts behind the next-generation work cell semiconductor manufacturing system capable of achieving competitive advantages in product quality, variety, cost, and time to market are presented. The new system with modular work cells is targeted at high product variety and lean production. This contrasts with the traditional job shop system targeted at low product variety and mass production. In the new work cell system, each cell consists of different types of machines performing multiple and consecutive functions. It increases flexibility by decomposing operations into parallel lines, and streamlines the production flow by moving wafers in small lot sizes with minimum buffers. Other issues such as operational flow control, equipment selections, and people-centered improvement in the new system are addressed
Keywords :
VLSI; cluster tools; integrated circuit manufacture; process control; production control; resource allocation; VLSI fabrication; cluster tools; cost; equipment selections; flexibility; high product variety; lean production; minimum buffers; modular work cells; operational flow control; parallel lines; people-centered improvement; product quality; production flow; semiconductor manufacturing system; streamlines; time to market; work cell manufacturing system; Costs; Fabrication; Flow production systems; Lean production; Manufacturing systems; Mass production; Production facilities; Quality control; Time to market; Very large scale integration;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1993, Fifteenth IEEE/CHMT International
Conference_Location :
Santa Clara, CA
Print_ISBN :
0-7803-1424-7
DOI :
10.1109/IEMT.1993.398202
