An integrated database system for effective correlation analysis to improve LSI manufacturing yield

An integrated relational database (DB) system consisting of process, PMTEG (Process Monitoring Test Element Group), and LSI testing DBs is implemented on a high speed DB machine for effective correlation analysis. For saving DB machine disk area, only the process data necessary for correlation analyses are temporarily stored in the DB on the DB machine. The body of the process data is stored in a distributed DB on the EWSs used to control the LSI manufacturing line equipment. A correlation analysis program, which has a user-friendly window-type man-machine interface, has been developed for the integrated DB. The program retrieves data at high speed with parallel access to the DB. The total performance of the correlation analyses is improved over ten times compared with the old system that included stand-alone DBs and a PC-based correlation analysis program