LiNbO3 thin single crystal layer for RF applications

For the first time, fabrication of sub-micron thick single crystal lithium niobate (LiNbO₃) membranes on which Film Bulk Acoustic Resonator (FBAR) is reported. The transfer of thin single crystal piezoelectric layers on specific base substrate has been physically and electrically characterized showing to be an innovative and efficient substrate solution for FBAR applications: resonances close to 2.35 GHz with an electromechanical coupling factor of 3.8 % were obtained. Characterized membranes were obtained using the Smart Cut^TM technology developed for piezoelectric material such as LiNbO₃.