Parylene BioMEMS

This paper describes parylene as an emerging bioMEMS material. Parylene has the unique feature of room-temperature, pinhole-free conformal CVD deposition. It is chemically inert and biocompatible. More interestingly, it is found that parylene thin film usually possesses a tensile intrinsic stress, controlled by the last thermal steps. These features allow free-standing parylene MEMS structures in many designs. Parylene MEMS is also a suitable technology for post-CMOS integration. As a result, multi-layer parylene MEMS technology has been developed, especially for bioMEMS applications. This paper also gives examples of integrated parylene microfluidics and HPLC on-a-chip